薄膜初期成核及表面形貌的蒙特卡羅模擬.pdf

1、東北大學碩士學位論文薄膜初期成核及表面形貌的蒙特卡羅模擬姓名：王志秀申請學位級別：碩士專業(yè)：流體機械及工程指導教師：張以忱20060101東北大學碩士學位論文AbstractMonteCarloSimulationofEarlyNucleationandSurfaceMorphologyofThinFilmAbstractThethinfilmtechnologyisplayingaveryimportantroleinthemodem

2、hightechfield，andthedevelopmentofanumberofnewmaterialsandapparatusisonthebaseofthinfilmfabricationButbecauseofcomplicatedgrowingprocessofthinfilm，therearesomedifficultiestostudythinfilmgrowthwithexperimentalmethodsandthe

3、oreticalanalysesAsaresult，computersimulationtechniquesweredevelopedtostudythemicrogrowthofthethinfilmAfterabriefdescriptionoffilmgrowthmechanismandrelevantcomputersimulationtechniques，anewthreedimensionalmodelforthinfilm

4、growthispresented，andaMonteCarlosimulationbasedonthismodelinvestigatestheearlynucleationandsurfacemorphologyofthinfilmgrowthThesimulationparameters，suchasinitialenergyofparticles，depositionrateandsubstratetemperaturearec

5、hangedtostudytheireffectsontheresultsofthesimulationInadditionsomeofthesimulationresultsareverifiedbyexperiments，nrstly’themodelisexaminedfromtwoaspects，oneistheuniformityofrandomnumbers，andtheotheristhemaineventshappeni

6、ngindepositingprocessInthesimuIation，theeffectsofchanginginitialenergyofparticles，depositionrateandtemperatureonfihngrowtharerevealedbycalculatingislandnumbersandaverageparticlesofislandsandanalyzingsurfacemorphologyTemp

7、eratureisfoundtohavefunctiononsurfacemorphologybycalculatingmotmeansquareroughnessSomeofthesimulationresultsareverifiedbyexperiments，andexperimentalparametersaredescribedinordertointerpretexperimentalobservationsforcompa